7/22/2010	12:17:55 AM	Helium valve closed
7/22/2010	12:17:55 AM	H2 valve closed
7/22/2010	12:17:55 AM	BCl3 valve closed
7/22/2010	12:17:55 AM	PH3 valve closed
7/22/2010	12:17:55 AM	SiCl4 pre valve closed
7/22/2010	12:17:55 AM	SiCl4 post valve closed
7/22/2010	12:17:55 AM	Main Vac valve closed
7/22/2010	12:17:55 AM	Bypass valve closed
7/22/2010	12:17:55 AM	Bubbler valve closed
7/22/2010	12:17:55 AM	Helium MFC set to  0.000000
7/22/2010	12:17:55 AM	H2 MFC set to  0.000000
7/22/2010	12:17:55 AM	BCl3 MFC set to  0.000000
7/22/2010	12:17:55 AM	PHl3 MFC set to  0.000000
7/22/2010	12:17:55 AM	SiCl4 MFC set to  0.000000
7/22/2010	12:17:55 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:17:55 AM	Tube furnace set to 0
7/22/2010	12:17:55 AM	Run finished at 12:17 AM
7/22/2010	12:26:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	12:26:27 AM	Recipe started at 12:26 AM
7/22/2010	12:26:27 AM	Helium valve closed
7/22/2010	12:26:27 AM	H2 valve closed
7/22/2010	12:26:27 AM	BCl3 valve closed
7/22/2010	12:26:27 AM	PH3 valve closed
7/22/2010	12:26:27 AM	SiCl4 pre valve closed
7/22/2010	12:26:27 AM	SiCl4 post valve closed
7/22/2010	12:26:27 AM	Main Vac valve closed
7/22/2010	12:26:27 AM	Bubbler valve closed
7/22/2010	12:26:27 AM	Bypass valve opened
7/22/2010	12:26:27 AM	Helium MFC set to  0.000000
7/22/2010	12:26:27 AM	H2 MFC set to  0.000000
7/22/2010	12:26:27 AM	BCl3 MFC set to  0.000000
7/22/2010	12:26:27 AM	PHl3 MFC set to  0.000000
7/22/2010	12:26:27 AM	SiCl4 MFC set to  0.000000
7/22/2010	12:26:27 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:26:27 AM	Tube furnace set to 0
7/22/2010	12:27:02 AM	Helium valve closed
7/22/2010	12:27:02 AM	H2 valve closed
7/22/2010	12:27:02 AM	BCl3 valve closed
7/22/2010	12:27:02 AM	PH3 valve closed
7/22/2010	12:27:02 AM	SiCl4 pre valve closed
7/22/2010	12:27:02 AM	SiCl4 post valve closed
7/22/2010	12:27:02 AM	Bubbler valve closed
7/22/2010	12:27:02 AM	Main Vac valve opened
7/22/2010	12:27:02 AM	Bypass valve opened
7/22/2010	12:27:02 AM	Helium MFC set to  0.000000
7/22/2010	12:27:02 AM	H2 MFC set to  0.000000
7/22/2010	12:27:02 AM	BCl3 MFC set to  0.000000
7/22/2010	12:27:02 AM	PHl3 MFC set to  0.000000
7/22/2010	12:27:02 AM	SiCl4 MFC set to  0.000000
7/22/2010	12:27:02 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:27:03 AM	Tube furnace set to 0
7/22/2010	12:27:03 AM	Run finished at 12:27 AM
7/22/2010	12:27:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	12:29:22 AM	Bypass valve closed
7/22/2010	12:29:24 AM	Main Vac valve closed
7/22/2010	12:29:35 AM	Main Vac valve opened
7/22/2010	12:29:39 AM	Bypass valve opened
7/22/2010	9:02:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2010	9:02:21 AM	Recipe started at 9:02 AM
7/22/2010	9:02:21 AM	H2 valve closed
7/22/2010	9:02:21 AM	BCl3 valve closed
7/22/2010	9:02:21 AM	PH3 valve closed
7/22/2010	9:02:21 AM	SiCl4 pre valve closed
7/22/2010	9:02:21 AM	SiCl4 post valve closed
7/22/2010	9:02:21 AM	Main Vac valve closed
7/22/2010	9:02:21 AM	Bypass valve closed
7/22/2010	9:02:21 AM	Bubbler valve closed
7/22/2010	9:02:21 AM	Helium valve opened
7/22/2010	9:02:21 AM	Helium MFC set to  500.000000
7/22/2010	9:02:21 AM	H2 MFC set to  0.000000
7/22/2010	9:02:21 AM	BCl3 MFC set to  0.000000
7/22/2010	9:02:21 AM	PHl3 MFC set to  0.000000
7/22/2010	9:02:21 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:02:21 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:02:21 AM	Tube furnace set to 0
7/22/2010	9:03:41 AM	Helium valve closed
7/22/2010	9:03:41 AM	H2 valve closed
7/22/2010	9:03:41 AM	BCl3 valve closed
7/22/2010	9:03:41 AM	PH3 valve closed
7/22/2010	9:03:41 AM	SiCl4 pre valve closed
7/22/2010	9:03:41 AM	SiCl4 post valve closed
7/22/2010	9:03:41 AM	Main Vac valve closed
7/22/2010	9:03:41 AM	Bypass valve closed
7/22/2010	9:03:41 AM	Bubbler valve closed
7/22/2010	9:03:41 AM	Helium MFC set to  0.000000
7/22/2010	9:03:41 AM	H2 MFC set to  0.000000
7/22/2010	9:03:41 AM	BCl3 MFC set to  0.000000
7/22/2010	9:03:41 AM	PHl3 MFC set to  0.000000
7/22/2010	9:03:41 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:03:41 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:03:41 AM	Tube furnace set to 0
7/22/2010	9:03:41 AM	Run finished at 9:03 AM
7/22/2010	9:03:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2010	9:06:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	9:06:22 AM	Recipe started at 9:06 AM
7/22/2010	9:06:22 AM	Helium valve closed
7/22/2010	9:06:22 AM	H2 valve closed
7/22/2010	9:06:22 AM	BCl3 valve closed
7/22/2010	9:06:22 AM	PH3 valve closed
7/22/2010	9:06:22 AM	SiCl4 pre valve closed
7/22/2010	9:06:22 AM	SiCl4 post valve closed
7/22/2010	9:06:22 AM	Main Vac valve closed
7/22/2010	9:06:22 AM	Bubbler valve closed
7/22/2010	9:06:22 AM	Bypass valve opened
7/22/2010	9:06:22 AM	Helium MFC set to  0.000000
7/22/2010	9:06:22 AM	H2 MFC set to  0.000000
7/22/2010	9:06:22 AM	BCl3 MFC set to  0.000000
7/22/2010	9:06:22 AM	PHl3 MFC set to  0.000000
7/22/2010	9:06:22 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:06:22 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:06:22 AM	Tube furnace set to 0
7/22/2010	9:06:56 AM	Helium valve closed
7/22/2010	9:06:56 AM	H2 valve closed
7/22/2010	9:06:56 AM	BCl3 valve closed
7/22/2010	9:06:56 AM	PH3 valve closed
7/22/2010	9:06:56 AM	SiCl4 pre valve closed
7/22/2010	9:06:56 AM	SiCl4 post valve closed
7/22/2010	9:06:56 AM	Bubbler valve closed
7/22/2010	9:06:56 AM	Main Vac valve opened
7/22/2010	9:06:56 AM	Bypass valve opened
7/22/2010	9:06:56 AM	Helium MFC set to  0.000000
7/22/2010	9:06:56 AM	H2 MFC set to  0.000000
7/22/2010	9:06:56 AM	BCl3 MFC set to  0.000000
7/22/2010	9:06:56 AM	PHl3 MFC set to  0.000000
7/22/2010	9:06:56 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:06:56 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:06:56 AM	Tube furnace set to 0
7/22/2010	9:06:57 AM	Run finished at 9:06 AM
7/22/2010	9:06:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	9:07:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2010	9:07:12 AM	Recipe started at 9:07 AM
7/22/2010	9:07:12 AM	H2 valve closed
7/22/2010	9:07:12 AM	BCl3 valve closed
7/22/2010	9:07:12 AM	PH3 valve closed
7/22/2010	9:07:12 AM	SiCl4 pre valve closed
7/22/2010	9:07:12 AM	SiCl4 post valve closed
7/22/2010	9:07:12 AM	Main Vac valve closed
7/22/2010	9:07:12 AM	Bypass valve closed
7/22/2010	9:07:12 AM	Bubbler valve closed
7/22/2010	9:07:12 AM	Helium valve opened
7/22/2010	9:07:12 AM	Helium MFC set to  500.000000
7/22/2010	9:07:12 AM	H2 MFC set to  0.000000
7/22/2010	9:07:12 AM	BCl3 MFC set to  0.000000
7/22/2010	9:07:12 AM	PHl3 MFC set to  0.000000
7/22/2010	9:07:12 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:07:12 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:07:12 AM	Tube furnace set to 0
7/22/2010	9:08:32 AM	Helium valve closed
7/22/2010	9:08:32 AM	H2 valve closed
7/22/2010	9:08:32 AM	BCl3 valve closed
7/22/2010	9:08:32 AM	PH3 valve closed
7/22/2010	9:08:32 AM	SiCl4 pre valve closed
7/22/2010	9:08:32 AM	SiCl4 post valve closed
7/22/2010	9:08:32 AM	Main Vac valve closed
7/22/2010	9:08:32 AM	Bypass valve closed
7/22/2010	9:08:32 AM	Bubbler valve closed
7/22/2010	9:08:32 AM	Helium MFC set to  0.000000
7/22/2010	9:08:32 AM	H2 MFC set to  0.000000
7/22/2010	9:08:32 AM	BCl3 MFC set to  0.000000
7/22/2010	9:08:32 AM	PHl3 MFC set to  0.000000
7/22/2010	9:08:32 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:08:32 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:08:32 AM	Tube furnace set to 0
7/22/2010	9:08:32 AM	Run finished at 9:08 AM
7/22/2010	9:08:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2010	9:11:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	9:11:21 AM	Recipe started at 9:11 AM
7/22/2010	9:11:21 AM	Helium valve closed
7/22/2010	9:11:21 AM	H2 valve closed
7/22/2010	9:11:21 AM	BCl3 valve closed
7/22/2010	9:11:21 AM	PH3 valve closed
7/22/2010	9:11:21 AM	SiCl4 pre valve closed
7/22/2010	9:11:21 AM	SiCl4 post valve closed
7/22/2010	9:11:21 AM	Main Vac valve closed
7/22/2010	9:11:21 AM	Bubbler valve closed
7/22/2010	9:11:21 AM	Bypass valve opened
7/22/2010	9:11:21 AM	Helium MFC set to  0.000000
7/22/2010	9:11:21 AM	H2 MFC set to  0.000000
7/22/2010	9:11:21 AM	BCl3 MFC set to  0.000000
7/22/2010	9:11:21 AM	PHl3 MFC set to  0.000000
7/22/2010	9:11:21 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:11:21 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:11:21 AM	Tube furnace set to 0
7/22/2010	9:11:56 AM	Helium valve closed
7/22/2010	9:11:56 AM	H2 valve closed
7/22/2010	9:11:56 AM	BCl3 valve closed
7/22/2010	9:11:56 AM	PH3 valve closed
7/22/2010	9:11:56 AM	SiCl4 pre valve closed
7/22/2010	9:11:56 AM	SiCl4 post valve closed
7/22/2010	9:11:56 AM	Bubbler valve closed
7/22/2010	9:11:56 AM	Main Vac valve opened
7/22/2010	9:11:56 AM	Bypass valve opened
7/22/2010	9:11:56 AM	Helium MFC set to  0.000000
7/22/2010	9:11:56 AM	H2 MFC set to  0.000000
7/22/2010	9:11:56 AM	BCl3 MFC set to  0.000000
7/22/2010	9:11:56 AM	PHl3 MFC set to  0.000000
7/22/2010	9:11:56 AM	SiCl4 MFC set to  0.000000
7/22/2010	9:11:56 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	9:11:56 AM	Tube furnace set to 0
7/22/2010	9:11:57 AM	Run finished at 9:11 AM
7/22/2010	9:11:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	9:52:16 AM	Helium MFC set to  75.000000
7/22/2010	9:52:17 AM	Helium valve opened
7/22/2010	10:15:13 AM	Helium valve closed
7/22/2010	10:17:47 AM	Recipe started at 10:17 AM
7/22/2010	10:17:47 AM	Helium valve closed
7/22/2010	10:17:47 AM	BCl3 valve closed
7/22/2010	10:17:47 AM	PH3 valve closed
7/22/2010	10:17:47 AM	SiCl4 pre valve closed
7/22/2010	10:17:47 AM	SiCl4 post valve closed
7/22/2010	10:17:47 AM	Main Vac valve closed
7/22/2010	10:17:47 AM	Bypass valve closed
7/22/2010	10:17:47 AM	Bubbler valve closed
7/22/2010	10:17:47 AM	H2 valve opened
7/22/2010	10:17:47 AM	Helium MFC set to  0.000000
7/22/2010	10:17:47 AM	H2 MFC set to  500.000000
7/22/2010	10:17:47 AM	BCl3 MFC set to  0.000000
7/22/2010	10:17:47 AM	PHl3 MFC set to  0.000000
7/22/2010	10:17:47 AM	SiCl4 MFC set to  0.000000
7/22/2010	10:17:47 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	10:17:48 AM	Tube furnace set to 0
7/22/2010	10:19:11 AM	Helium valve closed
7/22/2010	10:19:11 AM	BCl3 valve closed
7/22/2010	10:19:11 AM	PH3 valve closed
7/22/2010	10:19:11 AM	SiCl4 pre valve closed
7/22/2010	10:19:11 AM	SiCl4 post valve closed
7/22/2010	10:19:11 AM	Main Vac valve closed
7/22/2010	10:19:11 AM	Bypass valve closed
7/22/2010	10:19:11 AM	H2 valve opened
7/22/2010	10:19:11 AM	Bubbler valve opened
7/22/2010	10:19:11 AM	Helium MFC set to  0.000000
7/22/2010	10:19:11 AM	H2 MFC set to  500.000000
7/22/2010	10:19:11 AM	BCl3 MFC set to  0.000000
7/22/2010	10:19:11 AM	PHl3 MFC set to  0.000000
7/22/2010	10:19:11 AM	SiCl4 MFC set to  0.000000
7/22/2010	10:19:11 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	10:19:11 AM	Tube furnace set to 1000
7/22/2010	10:39:11 AM	Helium valve closed
7/22/2010	10:39:11 AM	BCl3 valve closed
7/22/2010	10:39:11 AM	PH3 valve closed
7/22/2010	10:39:11 AM	Main Vac valve closed
7/22/2010	10:39:11 AM	Bypass valve closed
7/22/2010	10:39:11 AM	H2 valve opened
7/22/2010	10:39:11 AM	SiCl4 pre valve opened
7/22/2010	10:39:11 AM	SiCl4 post valve opened
7/22/2010	10:39:11 AM	Bubbler valve opened
7/22/2010	10:39:11 AM	Helium MFC set to  0.000000
7/22/2010	10:39:11 AM	H2 MFC set to  500.000000
7/22/2010	10:39:11 AM	BCl3 MFC set to  0.000000
7/22/2010	10:39:11 AM	PHl3 MFC set to  0.000000
7/22/2010	10:39:11 AM	SiCl4 MFC set to  50.000000
7/22/2010	10:39:11 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	10:39:11 AM	Tube furnace set to 1000
7/22/2010	10:59:11 AM	H2 valve closed
7/22/2010	10:59:11 AM	BCl3 valve closed
7/22/2010	10:59:11 AM	PH3 valve closed
7/22/2010	10:59:11 AM	SiCl4 pre valve closed
7/22/2010	10:59:11 AM	SiCl4 post valve closed
7/22/2010	10:59:11 AM	Main Vac valve closed
7/22/2010	10:59:11 AM	Bypass valve closed
7/22/2010	10:59:11 AM	Helium valve opened
7/22/2010	10:59:11 AM	Bubbler valve opened
7/22/2010	10:59:11 AM	Helium MFC set to  500.000000
7/22/2010	10:59:11 AM	H2 MFC set to  0.000000
7/22/2010	10:59:11 AM	BCl3 MFC set to  0.000000
7/22/2010	10:59:11 AM	PHl3 MFC set to  0.000000
7/22/2010	10:59:11 AM	SiCl4 MFC set to  0.000000
7/22/2010	10:59:11 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	10:59:11 AM	Tube furnace set to 0
7/22/2010	11:33:12 AM	Helium valve closed
7/22/2010	11:33:12 AM	H2 valve closed
7/22/2010	11:33:12 AM	BCl3 valve closed
7/22/2010	11:33:12 AM	PH3 valve closed
7/22/2010	11:33:12 AM	SiCl4 pre valve closed
7/22/2010	11:33:12 AM	SiCl4 post valve closed
7/22/2010	11:33:12 AM	Main Vac valve closed
7/22/2010	11:33:12 AM	Bypass valve closed
7/22/2010	11:33:12 AM	Bubbler valve closed
7/22/2010	11:33:12 AM	Helium MFC set to  0.000000
7/22/2010	11:33:12 AM	H2 MFC set to  0.000000
7/22/2010	11:33:12 AM	BCl3 MFC set to  0.000000
7/22/2010	11:33:12 AM	PHl3 MFC set to  0.000000
7/22/2010	11:33:12 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:33:12 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:33:12 AM	Tube furnace set to 0
7/22/2010	11:33:12 AM	Run finished at 11:33 AM
7/22/2010	11:37:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	11:37:33 AM	Recipe started at 11:37 AM
7/22/2010	11:37:33 AM	Helium valve closed
7/22/2010	11:37:33 AM	H2 valve closed
7/22/2010	11:37:33 AM	BCl3 valve closed
7/22/2010	11:37:33 AM	PH3 valve closed
7/22/2010	11:37:33 AM	SiCl4 pre valve closed
7/22/2010	11:37:33 AM	SiCl4 post valve closed
7/22/2010	11:37:33 AM	Main Vac valve closed
7/22/2010	11:37:33 AM	Bubbler valve closed
7/22/2010	11:37:33 AM	Bypass valve opened
7/22/2010	11:37:33 AM	Helium MFC set to  0.000000
7/22/2010	11:37:33 AM	H2 MFC set to  0.000000
7/22/2010	11:37:33 AM	BCl3 MFC set to  0.000000
7/22/2010	11:37:33 AM	PHl3 MFC set to  0.000000
7/22/2010	11:37:33 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:37:33 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:37:33 AM	Tube furnace set to 0
7/22/2010	11:38:09 AM	Helium valve closed
7/22/2010	11:38:09 AM	H2 valve closed
7/22/2010	11:38:09 AM	BCl3 valve closed
7/22/2010	11:38:09 AM	PH3 valve closed
7/22/2010	11:38:09 AM	SiCl4 pre valve closed
7/22/2010	11:38:09 AM	SiCl4 post valve closed
7/22/2010	11:38:09 AM	Bubbler valve closed
7/22/2010	11:38:09 AM	Main Vac valve opened
7/22/2010	11:38:09 AM	Bypass valve opened
7/22/2010	11:38:09 AM	Helium MFC set to  0.000000
7/22/2010	11:38:09 AM	H2 MFC set to  0.000000
7/22/2010	11:38:09 AM	BCl3 MFC set to  0.000000
7/22/2010	11:38:09 AM	PHl3 MFC set to  0.000000
7/22/2010	11:38:09 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:38:09 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:38:10 AM	Tube furnace set to 0
7/22/2010	11:38:49 AM	H2 valve closed
7/22/2010	11:38:49 AM	BCl3 valve closed
7/22/2010	11:38:49 AM	PH3 valve closed
7/22/2010	11:38:49 AM	SiCl4 pre valve closed
7/22/2010	11:38:49 AM	SiCl4 post valve closed
7/22/2010	11:38:49 AM	Bubbler valve closed
7/22/2010	11:38:49 AM	Helium valve opened
7/22/2010	11:38:49 AM	Main Vac valve opened
7/22/2010	11:38:49 AM	Bypass valve opened
7/22/2010	11:38:49 AM	Helium MFC set to  100.000000
7/22/2010	11:38:49 AM	H2 MFC set to  0.000000
7/22/2010	11:38:49 AM	BCl3 MFC set to  0.000000
7/22/2010	11:38:49 AM	PHl3 MFC set to  0.000000
7/22/2010	11:38:49 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:38:49 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:38:49 AM	Tube furnace set to 0
7/22/2010	11:47:49 AM	Helium valve closed
7/22/2010	11:47:49 AM	H2 valve closed
7/22/2010	11:47:49 AM	BCl3 valve closed
7/22/2010	11:47:49 AM	PH3 valve closed
7/22/2010	11:47:49 AM	SiCl4 pre valve closed
7/22/2010	11:47:49 AM	SiCl4 post valve closed
7/22/2010	11:47:49 AM	Bubbler valve closed
7/22/2010	11:47:49 AM	Main Vac valve opened
7/22/2010	11:47:49 AM	Bypass valve opened
7/22/2010	11:47:49 AM	Helium MFC set to  0.000000
7/22/2010	11:47:49 AM	H2 MFC set to  0.000000
7/22/2010	11:47:49 AM	BCl3 MFC set to  0.000000
7/22/2010	11:47:49 AM	PHl3 MFC set to  0.000000
7/22/2010	11:47:49 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:47:49 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:47:49 AM	Tube furnace set to 0
7/22/2010	11:48:49 AM	H2 valve closed
7/22/2010	11:48:49 AM	BCl3 valve closed
7/22/2010	11:48:49 AM	PH3 valve closed
7/22/2010	11:48:49 AM	SiCl4 pre valve closed
7/22/2010	11:48:49 AM	SiCl4 post valve closed
7/22/2010	11:48:49 AM	Bubbler valve closed
7/22/2010	11:48:50 AM	Helium valve opened
7/22/2010	11:48:50 AM	Main Vac valve opened
7/22/2010	11:48:50 AM	Bypass valve opened
7/22/2010	11:48:50 AM	Helium MFC set to  100.000000
7/22/2010	11:48:50 AM	H2 MFC set to  0.000000
7/22/2010	11:48:50 AM	BCl3 MFC set to  0.000000
7/22/2010	11:48:50 AM	PHl3 MFC set to  0.000000
7/22/2010	11:48:50 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:48:50 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:48:50 AM	Tube furnace set to 0
7/22/2010	11:57:50 AM	Helium valve closed
7/22/2010	11:57:50 AM	H2 valve closed
7/22/2010	11:57:50 AM	BCl3 valve closed
7/22/2010	11:57:50 AM	PH3 valve closed
7/22/2010	11:57:50 AM	SiCl4 pre valve closed
7/22/2010	11:57:50 AM	SiCl4 post valve closed
7/22/2010	11:57:50 AM	Bubbler valve closed
7/22/2010	11:57:50 AM	Main Vac valve opened
7/22/2010	11:57:50 AM	Bypass valve opened
7/22/2010	11:57:50 AM	Helium MFC set to  0.000000
7/22/2010	11:57:50 AM	H2 MFC set to  0.000000
7/22/2010	11:57:50 AM	BCl3 MFC set to  0.000000
7/22/2010	11:57:50 AM	PHl3 MFC set to  0.000000
7/22/2010	11:57:50 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:57:50 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:57:50 AM	Tube furnace set to 0
7/22/2010	11:58:50 AM	H2 valve closed
7/22/2010	11:58:50 AM	BCl3 valve closed
7/22/2010	11:58:50 AM	PH3 valve closed
7/22/2010	11:58:50 AM	SiCl4 pre valve closed
7/22/2010	11:58:50 AM	SiCl4 post valve closed
7/22/2010	11:58:50 AM	Bubbler valve closed
7/22/2010	11:58:50 AM	Helium valve opened
7/22/2010	11:58:50 AM	Main Vac valve opened
7/22/2010	11:58:50 AM	Bypass valve opened
7/22/2010	11:58:50 AM	Helium MFC set to  100.000000
7/22/2010	11:58:50 AM	H2 MFC set to  0.000000
7/22/2010	11:58:50 AM	BCl3 MFC set to  0.000000
7/22/2010	11:58:50 AM	PHl3 MFC set to  0.000000
7/22/2010	11:58:50 AM	SiCl4 MFC set to  0.000000
7/22/2010	11:58:50 AM	Bypass solenoid MFC set to  0.000000
7/22/2010	11:58:50 AM	Tube furnace set to 0
7/22/2010	12:07:50 PM	Helium valve closed
7/22/2010	12:07:50 PM	H2 valve closed
7/22/2010	12:07:50 PM	BCl3 valve closed
7/22/2010	12:07:50 PM	PH3 valve closed
7/22/2010	12:07:50 PM	SiCl4 pre valve closed
7/22/2010	12:07:50 PM	SiCl4 post valve closed
7/22/2010	12:07:50 PM	Bubbler valve closed
7/22/2010	12:07:50 PM	Main Vac valve opened
7/22/2010	12:07:50 PM	Bypass valve opened
7/22/2010	12:07:50 PM	Helium MFC set to  0.000000
7/22/2010	12:07:50 PM	H2 MFC set to  0.000000
7/22/2010	12:07:50 PM	BCl3 MFC set to  0.000000
7/22/2010	12:07:50 PM	PHl3 MFC set to  0.000000
7/22/2010	12:07:50 PM	SiCl4 MFC set to  0.000000
7/22/2010	12:07:50 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:07:50 PM	Tube furnace set to 0
7/22/2010	12:07:51 PM	Run finished at 12:07 PM
7/22/2010	12:07:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	12:34:37 PM	Helium MFC set to  100.000000
7/22/2010	12:34:38 PM	Helium valve opened
7/22/2010	12:35:36 PM	Helium valve closed
7/22/2010	12:36:35 PM	Recipe started at 12:36 PM
7/22/2010	12:36:35 PM	Helium valve closed
7/22/2010	12:36:35 PM	BCl3 valve closed
7/22/2010	12:36:35 PM	PH3 valve closed
7/22/2010	12:36:35 PM	SiCl4 pre valve closed
7/22/2010	12:36:35 PM	SiCl4 post valve closed
7/22/2010	12:36:35 PM	Main Vac valve closed
7/22/2010	12:36:35 PM	Bypass valve closed
7/22/2010	12:36:35 PM	Bubbler valve closed
7/22/2010	12:36:35 PM	H2 valve opened
7/22/2010	12:36:35 PM	Helium MFC set to  0.000000
7/22/2010	12:36:35 PM	H2 MFC set to  500.000000
7/22/2010	12:36:35 PM	BCl3 MFC set to  0.000000
7/22/2010	12:36:35 PM	PHl3 MFC set to  0.000000
7/22/2010	12:36:35 PM	SiCl4 MFC set to  0.000000
7/22/2010	12:36:35 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:36:35 PM	Tube furnace set to 0
7/22/2010	12:37:57 PM	Helium valve closed
7/22/2010	12:37:57 PM	BCl3 valve closed
7/22/2010	12:37:57 PM	PH3 valve closed
7/22/2010	12:37:57 PM	SiCl4 pre valve closed
7/22/2010	12:37:57 PM	SiCl4 post valve closed
7/22/2010	12:37:57 PM	Main Vac valve closed
7/22/2010	12:37:57 PM	Bypass valve closed
7/22/2010	12:37:57 PM	H2 valve opened
7/22/2010	12:37:57 PM	Bubbler valve opened
7/22/2010	12:37:57 PM	Helium MFC set to  0.000000
7/22/2010	12:37:57 PM	H2 MFC set to  500.000000
7/22/2010	12:37:57 PM	BCl3 MFC set to  0.000000
7/22/2010	12:37:57 PM	PHl3 MFC set to  0.000000
7/22/2010	12:37:57 PM	SiCl4 MFC set to  0.000000
7/22/2010	12:37:57 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:37:58 PM	Tube furnace set to 1000
7/22/2010	12:57:58 PM	Helium valve closed
7/22/2010	12:57:58 PM	BCl3 valve closed
7/22/2010	12:57:58 PM	PH3 valve closed
7/22/2010	12:57:58 PM	Main Vac valve closed
7/22/2010	12:57:58 PM	Bypass valve closed
7/22/2010	12:57:58 PM	H2 valve opened
7/22/2010	12:57:58 PM	SiCl4 pre valve opened
7/22/2010	12:57:58 PM	SiCl4 post valve opened
7/22/2010	12:57:58 PM	Bubbler valve opened
7/22/2010	12:57:58 PM	Helium MFC set to  0.000000
7/22/2010	12:57:58 PM	H2 MFC set to  500.000000
7/22/2010	12:57:58 PM	BCl3 MFC set to  0.000000
7/22/2010	12:57:58 PM	PHl3 MFC set to  0.000000
7/22/2010	12:57:58 PM	SiCl4 MFC set to  50.000000
7/22/2010	12:57:58 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	12:57:58 PM	Tube furnace set to 1000
7/22/2010	1:12:58 PM	H2 valve closed
7/22/2010	1:12:58 PM	BCl3 valve closed
7/22/2010	1:12:58 PM	PH3 valve closed
7/22/2010	1:12:58 PM	SiCl4 pre valve closed
7/22/2010	1:12:58 PM	SiCl4 post valve closed
7/22/2010	1:12:58 PM	Main Vac valve closed
7/22/2010	1:12:58 PM	Bypass valve closed
7/22/2010	1:12:58 PM	Helium valve opened
7/22/2010	1:12:58 PM	Bubbler valve opened
7/22/2010	1:12:58 PM	Helium MFC set to  500.000000
7/22/2010	1:12:58 PM	H2 MFC set to  0.000000
7/22/2010	1:12:58 PM	BCl3 MFC set to  0.000000
7/22/2010	1:12:58 PM	PHl3 MFC set to  0.000000
7/22/2010	1:12:58 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:12:58 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:12:58 PM	Tube furnace set to 0
7/22/2010	1:34:58 PM	Helium valve closed
7/22/2010	1:34:58 PM	H2 valve closed
7/22/2010	1:34:58 PM	BCl3 valve closed
7/22/2010	1:34:58 PM	PH3 valve closed
7/22/2010	1:34:58 PM	SiCl4 pre valve closed
7/22/2010	1:34:58 PM	SiCl4 post valve closed
7/22/2010	1:34:58 PM	Main Vac valve closed
7/22/2010	1:34:58 PM	Bypass valve closed
7/22/2010	1:34:58 PM	Bubbler valve closed
7/22/2010	1:34:58 PM	Helium MFC set to  0.000000
7/22/2010	1:34:58 PM	H2 MFC set to  0.000000
7/22/2010	1:34:58 PM	BCl3 MFC set to  0.000000
7/22/2010	1:34:58 PM	PHl3 MFC set to  0.000000
7/22/2010	1:34:58 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:34:58 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:34:58 PM	Tube furnace set to 0
7/22/2010	1:34:58 PM	Run finished at 1:34 PM
7/22/2010	1:38:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	1:38:56 PM	Recipe started at 1:38 PM
7/22/2010	1:38:56 PM	Helium valve closed
7/22/2010	1:38:56 PM	H2 valve closed
7/22/2010	1:38:56 PM	BCl3 valve closed
7/22/2010	1:38:56 PM	PH3 valve closed
7/22/2010	1:38:56 PM	SiCl4 pre valve closed
7/22/2010	1:38:56 PM	SiCl4 post valve closed
7/22/2010	1:38:56 PM	Main Vac valve closed
7/22/2010	1:38:56 PM	Bubbler valve closed
7/22/2010	1:38:56 PM	Bypass valve opened
7/22/2010	1:38:56 PM	Helium MFC set to  0.000000
7/22/2010	1:38:56 PM	H2 MFC set to  0.000000
7/22/2010	1:38:56 PM	BCl3 MFC set to  0.000000
7/22/2010	1:38:56 PM	PHl3 MFC set to  0.000000
7/22/2010	1:38:56 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:38:56 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:38:57 PM	Tube furnace set to 0
7/22/2010	1:39:32 PM	Helium valve closed
7/22/2010	1:39:32 PM	H2 valve closed
7/22/2010	1:39:32 PM	BCl3 valve closed
7/22/2010	1:39:32 PM	PH3 valve closed
7/22/2010	1:39:32 PM	SiCl4 pre valve closed
7/22/2010	1:39:32 PM	SiCl4 post valve closed
7/22/2010	1:39:32 PM	Bubbler valve closed
7/22/2010	1:39:32 PM	Main Vac valve opened
7/22/2010	1:39:32 PM	Bypass valve opened
7/22/2010	1:39:32 PM	Helium MFC set to  0.000000
7/22/2010	1:39:32 PM	H2 MFC set to  0.000000
7/22/2010	1:39:32 PM	BCl3 MFC set to  0.000000
7/22/2010	1:39:32 PM	PHl3 MFC set to  0.000000
7/22/2010	1:39:32 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:39:32 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:39:33 PM	Tube furnace set to 0
7/22/2010	1:39:35 PM	H2 valve closed
7/22/2010	1:39:35 PM	BCl3 valve closed
7/22/2010	1:39:35 PM	PH3 valve closed
7/22/2010	1:39:35 PM	SiCl4 pre valve closed
7/22/2010	1:39:35 PM	SiCl4 post valve closed
7/22/2010	1:39:35 PM	Bubbler valve closed
7/22/2010	1:39:35 PM	Helium valve opened
7/22/2010	1:39:35 PM	Main Vac valve opened
7/22/2010	1:39:35 PM	Bypass valve opened
7/22/2010	1:39:35 PM	Helium MFC set to  100.000000
7/22/2010	1:39:35 PM	H2 MFC set to  0.000000
7/22/2010	1:39:35 PM	BCl3 MFC set to  0.000000
7/22/2010	1:39:35 PM	PHl3 MFC set to  0.000000
7/22/2010	1:39:35 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:39:35 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:39:35 PM	Tube furnace set to 0
7/22/2010	1:48:35 PM	Helium valve closed
7/22/2010	1:48:35 PM	H2 valve closed
7/22/2010	1:48:35 PM	BCl3 valve closed
7/22/2010	1:48:35 PM	PH3 valve closed
7/22/2010	1:48:35 PM	SiCl4 pre valve closed
7/22/2010	1:48:35 PM	SiCl4 post valve closed
7/22/2010	1:48:35 PM	Bubbler valve closed
7/22/2010	1:48:35 PM	Main Vac valve opened
7/22/2010	1:48:35 PM	Bypass valve opened
7/22/2010	1:48:35 PM	Helium MFC set to  0.000000
7/22/2010	1:48:35 PM	H2 MFC set to  0.000000
7/22/2010	1:48:35 PM	BCl3 MFC set to  0.000000
7/22/2010	1:48:35 PM	PHl3 MFC set to  0.000000
7/22/2010	1:48:35 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:48:35 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:48:35 PM	Tube furnace set to 0
7/22/2010	1:49:35 PM	H2 valve closed
7/22/2010	1:49:35 PM	BCl3 valve closed
7/22/2010	1:49:35 PM	PH3 valve closed
7/22/2010	1:49:35 PM	SiCl4 pre valve closed
7/22/2010	1:49:35 PM	SiCl4 post valve closed
7/22/2010	1:49:35 PM	Bubbler valve closed
7/22/2010	1:49:35 PM	Helium valve opened
7/22/2010	1:49:35 PM	Main Vac valve opened
7/22/2010	1:49:35 PM	Bypass valve opened
7/22/2010	1:49:35 PM	Helium MFC set to  100.000000
7/22/2010	1:49:35 PM	H2 MFC set to  0.000000
7/22/2010	1:49:35 PM	BCl3 MFC set to  0.000000
7/22/2010	1:49:35 PM	PHl3 MFC set to  0.000000
7/22/2010	1:49:35 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:49:35 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:49:35 PM	Tube furnace set to 0
7/22/2010	1:58:35 PM	Helium valve closed
7/22/2010	1:58:35 PM	H2 valve closed
7/22/2010	1:58:35 PM	BCl3 valve closed
7/22/2010	1:58:35 PM	PH3 valve closed
7/22/2010	1:58:35 PM	SiCl4 pre valve closed
7/22/2010	1:58:35 PM	SiCl4 post valve closed
7/22/2010	1:58:35 PM	Bubbler valve closed
7/22/2010	1:58:35 PM	Main Vac valve opened
7/22/2010	1:58:35 PM	Bypass valve opened
7/22/2010	1:58:35 PM	Helium MFC set to  0.000000
7/22/2010	1:58:35 PM	H2 MFC set to  0.000000
7/22/2010	1:58:35 PM	BCl3 MFC set to  0.000000
7/22/2010	1:58:35 PM	PHl3 MFC set to  0.000000
7/22/2010	1:58:35 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:58:35 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:58:36 PM	Tube furnace set to 0
7/22/2010	1:59:36 PM	H2 valve closed
7/22/2010	1:59:36 PM	BCl3 valve closed
7/22/2010	1:59:36 PM	PH3 valve closed
7/22/2010	1:59:36 PM	SiCl4 pre valve closed
7/22/2010	1:59:36 PM	SiCl4 post valve closed
7/22/2010	1:59:36 PM	Bubbler valve closed
7/22/2010	1:59:36 PM	Helium valve opened
7/22/2010	1:59:36 PM	Main Vac valve opened
7/22/2010	1:59:36 PM	Bypass valve opened
7/22/2010	1:59:36 PM	Helium MFC set to  100.000000
7/22/2010	1:59:36 PM	H2 MFC set to  0.000000
7/22/2010	1:59:36 PM	BCl3 MFC set to  0.000000
7/22/2010	1:59:36 PM	PHl3 MFC set to  0.000000
7/22/2010	1:59:36 PM	SiCl4 MFC set to  0.000000
7/22/2010	1:59:36 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	1:59:36 PM	Tube furnace set to 0
7/22/2010	2:04:21 PM	Helium valve closed
7/22/2010	2:04:21 PM	H2 valve closed
7/22/2010	2:04:21 PM	BCl3 valve closed
7/22/2010	2:04:21 PM	PH3 valve closed
7/22/2010	2:04:21 PM	SiCl4 pre valve closed
7/22/2010	2:04:21 PM	SiCl4 post valve closed
7/22/2010	2:04:21 PM	Bubbler valve closed
7/22/2010	2:04:21 PM	Main Vac valve opened
7/22/2010	2:04:21 PM	Bypass valve opened
7/22/2010	2:04:21 PM	Helium MFC set to  0.000000
7/22/2010	2:04:21 PM	H2 MFC set to  0.000000
7/22/2010	2:04:22 PM	BCl3 MFC set to  0.000000
7/22/2010	2:04:22 PM	PHl3 MFC set to  0.000000
7/22/2010	2:04:22 PM	SiCl4 MFC set to  0.000000
7/22/2010	2:04:22 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	2:04:22 PM	Tube furnace set to 0
7/22/2010	2:04:23 PM	Run finished at 2:04 PM
7/22/2010	2:04:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	2:04:28 PM	Helium MFC set to  75.000000
7/22/2010	2:04:29 PM	Helium valve opened
7/22/2010	2:06:52 PM	Helium valve closed
7/22/2010	2:07:42 PM	Recipe started at 2:07 PM
7/22/2010	2:07:42 PM	Helium valve closed
7/22/2010	2:07:42 PM	BCl3 valve closed
7/22/2010	2:07:42 PM	PH3 valve closed
7/22/2010	2:07:42 PM	SiCl4 pre valve closed
7/22/2010	2:07:42 PM	SiCl4 post valve closed
7/22/2010	2:07:42 PM	Main Vac valve closed
7/22/2010	2:07:42 PM	Bypass valve closed
7/22/2010	2:07:42 PM	Bubbler valve closed
7/22/2010	2:07:42 PM	H2 valve opened
7/22/2010	2:07:42 PM	Helium MFC set to  0.000000
7/22/2010	2:07:42 PM	H2 MFC set to  500.000000
7/22/2010	2:07:42 PM	BCl3 MFC set to  0.000000
7/22/2010	2:07:42 PM	PHl3 MFC set to  0.000000
7/22/2010	2:07:42 PM	SiCl4 MFC set to  0.000000
7/22/2010	2:07:42 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	2:07:42 PM	Tube furnace set to 0
7/22/2010	2:09:04 PM	Helium valve closed
7/22/2010	2:09:04 PM	BCl3 valve closed
7/22/2010	2:09:04 PM	PH3 valve closed
7/22/2010	2:09:04 PM	SiCl4 pre valve closed
7/22/2010	2:09:04 PM	SiCl4 post valve closed
7/22/2010	2:09:04 PM	Main Vac valve closed
7/22/2010	2:09:04 PM	Bypass valve closed
7/22/2010	2:09:04 PM	H2 valve opened
7/22/2010	2:09:04 PM	Bubbler valve opened
7/22/2010	2:09:04 PM	Helium MFC set to  0.000000
7/22/2010	2:09:04 PM	H2 MFC set to  500.000000
7/22/2010	2:09:04 PM	BCl3 MFC set to  0.000000
7/22/2010	2:09:04 PM	PHl3 MFC set to  0.000000
7/22/2010	2:09:04 PM	SiCl4 MFC set to  0.000000
7/22/2010	2:09:04 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	2:09:04 PM	Tube furnace set to 1000
7/22/2010	2:29:04 PM	Helium valve closed
7/22/2010	2:29:04 PM	BCl3 valve closed
7/22/2010	2:29:04 PM	PH3 valve closed
7/22/2010	2:29:04 PM	Main Vac valve closed
7/22/2010	2:29:04 PM	Bypass valve closed
7/22/2010	2:29:04 PM	H2 valve opened
7/22/2010	2:29:04 PM	SiCl4 pre valve opened
7/22/2010	2:29:04 PM	SiCl4 post valve opened
7/22/2010	2:29:04 PM	Bubbler valve opened
7/22/2010	2:29:04 PM	Helium MFC set to  0.000000
7/22/2010	2:29:04 PM	H2 MFC set to  500.000000
7/22/2010	2:29:04 PM	BCl3 MFC set to  0.000000
7/22/2010	2:29:04 PM	PHl3 MFC set to  0.000000
7/22/2010	2:29:04 PM	SiCl4 MFC set to  50.000000
7/22/2010	2:29:04 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	2:29:04 PM	Tube furnace set to 1000
7/22/2010	2:44:04 PM	H2 valve closed
7/22/2010	2:44:04 PM	BCl3 valve closed
7/22/2010	2:44:04 PM	PH3 valve closed
7/22/2010	2:44:04 PM	SiCl4 pre valve closed
7/22/2010	2:44:04 PM	SiCl4 post valve closed
7/22/2010	2:44:04 PM	Main Vac valve closed
7/22/2010	2:44:04 PM	Bypass valve closed
7/22/2010	2:44:04 PM	Helium valve opened
7/22/2010	2:44:04 PM	Bubbler valve opened
7/22/2010	2:44:04 PM	Helium MFC set to  500.000000
7/22/2010	2:44:04 PM	H2 MFC set to  0.000000
7/22/2010	2:44:04 PM	BCl3 MFC set to  0.000000
7/22/2010	2:44:04 PM	PHl3 MFC set to  0.000000
7/22/2010	2:44:04 PM	SiCl4 MFC set to  0.000000
7/22/2010	2:44:04 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	2:44:04 PM	Tube furnace set to 0
7/22/2010	3:23:30 PM	Helium valve closed
7/22/2010	3:23:30 PM	H2 valve closed
7/22/2010	3:23:30 PM	BCl3 valve closed
7/22/2010	3:23:30 PM	PH3 valve closed
7/22/2010	3:23:30 PM	SiCl4 pre valve closed
7/22/2010	3:23:30 PM	SiCl4 post valve closed
7/22/2010	3:23:30 PM	Main Vac valve closed
7/22/2010	3:23:30 PM	Bypass valve closed
7/22/2010	3:23:30 PM	Bubbler valve closed
7/22/2010	3:23:30 PM	Helium MFC set to  0.000000
7/22/2010	3:23:30 PM	H2 MFC set to  0.000000
7/22/2010	3:23:30 PM	BCl3 MFC set to  0.000000
7/22/2010	3:23:30 PM	PHl3 MFC set to  0.000000
7/22/2010	3:23:30 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:23:30 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:23:30 PM	Tube furnace set to 0
7/22/2010	3:23:31 PM	Run finished at 3:23 PM
7/22/2010	3:28:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	3:28:21 PM	Recipe started at 3:28 PM
7/22/2010	3:28:21 PM	Helium valve closed
7/22/2010	3:28:21 PM	H2 valve closed
7/22/2010	3:28:21 PM	BCl3 valve closed
7/22/2010	3:28:21 PM	PH3 valve closed
7/22/2010	3:28:21 PM	SiCl4 pre valve closed
7/22/2010	3:28:21 PM	SiCl4 post valve closed
7/22/2010	3:28:21 PM	Main Vac valve closed
7/22/2010	3:28:21 PM	Bubbler valve closed
7/22/2010	3:28:21 PM	Bypass valve opened
7/22/2010	3:28:21 PM	Helium MFC set to  0.000000
7/22/2010	3:28:21 PM	H2 MFC set to  0.000000
7/22/2010	3:28:21 PM	BCl3 MFC set to  0.000000
7/22/2010	3:28:21 PM	PHl3 MFC set to  0.000000
7/22/2010	3:28:21 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:28:21 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:28:21 PM	Tube furnace set to 0
7/22/2010	3:28:58 PM	Helium valve closed
7/22/2010	3:28:58 PM	H2 valve closed
7/22/2010	3:28:58 PM	BCl3 valve closed
7/22/2010	3:28:58 PM	PH3 valve closed
7/22/2010	3:28:58 PM	SiCl4 pre valve closed
7/22/2010	3:28:58 PM	SiCl4 post valve closed
7/22/2010	3:28:58 PM	Bubbler valve closed
7/22/2010	3:28:58 PM	Main Vac valve opened
7/22/2010	3:28:58 PM	Bypass valve opened
7/22/2010	3:28:58 PM	Helium MFC set to  0.000000
7/22/2010	3:28:58 PM	H2 MFC set to  0.000000
7/22/2010	3:28:58 PM	BCl3 MFC set to  0.000000
7/22/2010	3:28:58 PM	PHl3 MFC set to  0.000000
7/22/2010	3:28:58 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:28:58 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:28:58 PM	Tube furnace set to 0
7/22/2010	3:28:58 PM	Run finished at 3:28 PM
7/22/2010	3:28:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	3:29:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2010	3:29:25 PM	Recipe started at 3:29 PM
7/22/2010	3:29:25 PM	H2 valve closed
7/22/2010	3:29:25 PM	BCl3 valve closed
7/22/2010	3:29:25 PM	PH3 valve closed
7/22/2010	3:29:25 PM	SiCl4 pre valve closed
7/22/2010	3:29:25 PM	SiCl4 post valve closed
7/22/2010	3:29:25 PM	Main Vac valve closed
7/22/2010	3:29:25 PM	Bypass valve closed
7/22/2010	3:29:25 PM	Bubbler valve closed
7/22/2010	3:29:25 PM	Helium valve opened
7/22/2010	3:29:25 PM	Helium MFC set to  500.000000
7/22/2010	3:29:25 PM	H2 MFC set to  0.000000
7/22/2010	3:29:25 PM	BCl3 MFC set to  0.000000
7/22/2010	3:29:25 PM	PHl3 MFC set to  0.000000
7/22/2010	3:29:25 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:29:25 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:29:26 PM	Tube furnace set to 0
7/22/2010	3:30:44 PM	Helium valve closed
7/22/2010	3:30:44 PM	H2 valve closed
7/22/2010	3:30:44 PM	BCl3 valve closed
7/22/2010	3:30:44 PM	PH3 valve closed
7/22/2010	3:30:44 PM	SiCl4 pre valve closed
7/22/2010	3:30:44 PM	SiCl4 post valve closed
7/22/2010	3:30:44 PM	Main Vac valve closed
7/22/2010	3:30:44 PM	Bypass valve closed
7/22/2010	3:30:44 PM	Bubbler valve closed
7/22/2010	3:30:44 PM	Helium MFC set to  0.000000
7/22/2010	3:30:44 PM	H2 MFC set to  0.000000
7/22/2010	3:30:44 PM	BCl3 MFC set to  0.000000
7/22/2010	3:30:44 PM	PHl3 MFC set to  0.000000
7/22/2010	3:30:44 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:30:44 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:30:44 PM	Tube furnace set to 0
7/22/2010	3:30:45 PM	Run finished at 3:30 PM
7/22/2010	3:30:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2010	3:33:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	3:33:29 PM	Recipe started at 3:33 PM
7/22/2010	3:33:29 PM	Helium valve closed
7/22/2010	3:33:29 PM	H2 valve closed
7/22/2010	3:33:29 PM	BCl3 valve closed
7/22/2010	3:33:29 PM	PH3 valve closed
7/22/2010	3:33:29 PM	SiCl4 pre valve closed
7/22/2010	3:33:29 PM	SiCl4 post valve closed
7/22/2010	3:33:29 PM	Main Vac valve closed
7/22/2010	3:33:29 PM	Bubbler valve closed
7/22/2010	3:33:29 PM	Bypass valve opened
7/22/2010	3:33:29 PM	Helium MFC set to  0.000000
7/22/2010	3:33:29 PM	H2 MFC set to  0.000000
7/22/2010	3:33:29 PM	BCl3 MFC set to  0.000000
7/22/2010	3:33:29 PM	PHl3 MFC set to  0.000000
7/22/2010	3:33:29 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:33:29 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:33:29 PM	Tube furnace set to 0
7/22/2010	3:34:05 PM	Helium valve closed
7/22/2010	3:34:05 PM	H2 valve closed
7/22/2010	3:34:05 PM	BCl3 valve closed
7/22/2010	3:34:05 PM	PH3 valve closed
7/22/2010	3:34:05 PM	SiCl4 pre valve closed
7/22/2010	3:34:05 PM	SiCl4 post valve closed
7/22/2010	3:34:05 PM	Bubbler valve closed
7/22/2010	3:34:05 PM	Main Vac valve opened
7/22/2010	3:34:05 PM	Bypass valve opened
7/22/2010	3:34:05 PM	Helium MFC set to  0.000000
7/22/2010	3:34:05 PM	H2 MFC set to  0.000000
7/22/2010	3:34:05 PM	BCl3 MFC set to  0.000000
7/22/2010	3:34:05 PM	PHl3 MFC set to  0.000000
7/22/2010	3:34:05 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:34:05 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:34:05 PM	Tube furnace set to 0
7/22/2010	3:35:05 PM	H2 valve closed
7/22/2010	3:35:05 PM	BCl3 valve closed
7/22/2010	3:35:05 PM	PH3 valve closed
7/22/2010	3:35:05 PM	SiCl4 pre valve closed
7/22/2010	3:35:05 PM	SiCl4 post valve closed
7/22/2010	3:35:05 PM	Bubbler valve closed
7/22/2010	3:35:05 PM	Helium valve opened
7/22/2010	3:35:05 PM	Main Vac valve opened
7/22/2010	3:35:05 PM	Bypass valve opened
7/22/2010	3:35:05 PM	Helium MFC set to  100.000000
7/22/2010	3:35:05 PM	H2 MFC set to  0.000000
7/22/2010	3:35:05 PM	BCl3 MFC set to  0.000000
7/22/2010	3:35:05 PM	PHl3 MFC set to  0.000000
7/22/2010	3:35:05 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:35:05 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:35:05 PM	Tube furnace set to 0
7/22/2010	3:43:24 PM	Helium valve closed
7/22/2010	3:43:24 PM	H2 valve closed
7/22/2010	3:43:24 PM	BCl3 valve closed
7/22/2010	3:43:24 PM	PH3 valve closed
7/22/2010	3:43:24 PM	SiCl4 pre valve closed
7/22/2010	3:43:24 PM	SiCl4 post valve closed
7/22/2010	3:43:24 PM	Bubbler valve closed
7/22/2010	3:43:24 PM	Main Vac valve opened
7/22/2010	3:43:24 PM	Bypass valve opened
7/22/2010	3:43:24 PM	Helium MFC set to  0.000000
7/22/2010	3:43:24 PM	H2 MFC set to  0.000000
7/22/2010	3:43:24 PM	BCl3 MFC set to  0.000000
7/22/2010	3:43:24 PM	PHl3 MFC set to  0.000000
7/22/2010	3:43:24 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:43:24 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:43:24 PM	Tube furnace set to 0
7/22/2010	3:43:28 PM	H2 valve closed
7/22/2010	3:43:28 PM	BCl3 valve closed
7/22/2010	3:43:28 PM	PH3 valve closed
7/22/2010	3:43:28 PM	SiCl4 pre valve closed
7/22/2010	3:43:28 PM	SiCl4 post valve closed
7/22/2010	3:43:28 PM	Bubbler valve closed
7/22/2010	3:43:28 PM	Helium valve opened
7/22/2010	3:43:28 PM	Main Vac valve opened
7/22/2010	3:43:28 PM	Bypass valve opened
7/22/2010	3:43:28 PM	Helium MFC set to  100.000000
7/22/2010	3:43:28 PM	H2 MFC set to  0.000000
7/22/2010	3:43:28 PM	BCl3 MFC set to  0.000000
7/22/2010	3:43:28 PM	PHl3 MFC set to  0.000000
7/22/2010	3:43:28 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:43:28 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:43:28 PM	Tube furnace set to 0
7/22/2010	3:43:29 PM	Helium valve closed
7/22/2010	3:43:29 PM	H2 valve closed
7/22/2010	3:43:29 PM	BCl3 valve closed
7/22/2010	3:43:29 PM	PH3 valve closed
7/22/2010	3:43:29 PM	SiCl4 pre valve closed
7/22/2010	3:43:29 PM	SiCl4 post valve closed
7/22/2010	3:43:29 PM	Bubbler valve closed
7/22/2010	3:43:29 PM	Main Vac valve opened
7/22/2010	3:43:29 PM	Bypass valve opened
7/22/2010	3:43:29 PM	Helium MFC set to  0.000000
7/22/2010	3:43:29 PM	H2 MFC set to  0.000000
7/22/2010	3:43:29 PM	BCl3 MFC set to  0.000000
7/22/2010	3:43:29 PM	PHl3 MFC set to  0.000000
7/22/2010	3:43:29 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:43:29 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:43:29 PM	Tube furnace set to 0
7/22/2010	3:43:32 PM	H2 valve closed
7/22/2010	3:43:32 PM	BCl3 valve closed
7/22/2010	3:43:32 PM	PH3 valve closed
7/22/2010	3:43:32 PM	SiCl4 pre valve closed
7/22/2010	3:43:32 PM	SiCl4 post valve closed
7/22/2010	3:43:32 PM	Bubbler valve closed
7/22/2010	3:43:32 PM	Helium valve opened
7/22/2010	3:43:32 PM	Main Vac valve opened
7/22/2010	3:43:32 PM	Bypass valve opened
7/22/2010	3:43:32 PM	Helium MFC set to  100.000000
7/22/2010	3:43:32 PM	H2 MFC set to  0.000000
7/22/2010	3:43:32 PM	BCl3 MFC set to  0.000000
7/22/2010	3:43:32 PM	PHl3 MFC set to  0.000000
7/22/2010	3:43:32 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:43:32 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:43:32 PM	Tube furnace set to 0
7/22/2010	3:43:36 PM	Helium valve closed
7/22/2010	3:43:36 PM	H2 valve closed
7/22/2010	3:43:36 PM	BCl3 valve closed
7/22/2010	3:43:36 PM	PH3 valve closed
7/22/2010	3:43:36 PM	SiCl4 pre valve closed
7/22/2010	3:43:36 PM	SiCl4 post valve closed
7/22/2010	3:43:36 PM	Bubbler valve closed
7/22/2010	3:43:36 PM	Main Vac valve opened
7/22/2010	3:43:36 PM	Bypass valve opened
7/22/2010	3:43:36 PM	Helium MFC set to  0.000000
7/22/2010	3:43:36 PM	H2 MFC set to  0.000000
7/22/2010	3:43:36 PM	BCl3 MFC set to  0.000000
7/22/2010	3:43:36 PM	PHl3 MFC set to  0.000000
7/22/2010	3:43:36 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:43:36 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:43:36 PM	Tube furnace set to 0
7/22/2010	3:43:37 PM	Run finished at 3:43 PM
7/22/2010	3:43:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	3:43:42 PM	Helium MFC set to  75.000000
7/22/2010	3:43:43 PM	Helium valve opened
7/22/2010	3:52:12 PM	Helium valve closed
7/22/2010	3:53:02 PM	Helium valve opened
7/22/2010	3:58:26 PM	Helium valve closed
7/22/2010	3:59:46 PM	Recipe started at 3:59 PM
7/22/2010	3:59:46 PM	Helium valve closed
7/22/2010	3:59:46 PM	BCl3 valve closed
7/22/2010	3:59:46 PM	PH3 valve closed
7/22/2010	3:59:46 PM	SiCl4 pre valve closed
7/22/2010	3:59:46 PM	SiCl4 post valve closed
7/22/2010	3:59:46 PM	Main Vac valve closed
7/22/2010	3:59:46 PM	Bypass valve closed
7/22/2010	3:59:46 PM	Bubbler valve closed
7/22/2010	3:59:46 PM	H2 valve opened
7/22/2010	3:59:46 PM	Helium MFC set to  0.000000
7/22/2010	3:59:46 PM	H2 MFC set to  500.000000
7/22/2010	3:59:46 PM	BCl3 MFC set to  0.000000
7/22/2010	3:59:46 PM	PHl3 MFC set to  0.000000
7/22/2010	3:59:46 PM	SiCl4 MFC set to  0.000000
7/22/2010	3:59:46 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	3:59:46 PM	Tube furnace set to 0
7/22/2010	4:01:08 PM	Helium valve closed
7/22/2010	4:01:08 PM	BCl3 valve closed
7/22/2010	4:01:08 PM	PH3 valve closed
7/22/2010	4:01:08 PM	SiCl4 pre valve closed
7/22/2010	4:01:08 PM	SiCl4 post valve closed
7/22/2010	4:01:08 PM	Main Vac valve closed
7/22/2010	4:01:08 PM	Bypass valve closed
7/22/2010	4:01:08 PM	H2 valve opened
7/22/2010	4:01:08 PM	Bubbler valve opened
7/22/2010	4:01:08 PM	Helium MFC set to  0.000000
7/22/2010	4:01:08 PM	H2 MFC set to  500.000000
7/22/2010	4:01:08 PM	BCl3 MFC set to  0.000000
7/22/2010	4:01:08 PM	PHl3 MFC set to  0.000000
7/22/2010	4:01:08 PM	SiCl4 MFC set to  0.000000
7/22/2010	4:01:08 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	4:01:08 PM	Tube furnace set to 1000
7/22/2010	4:21:08 PM	Helium valve closed
7/22/2010	4:21:08 PM	BCl3 valve closed
7/22/2010	4:21:08 PM	PH3 valve closed
7/22/2010	4:21:08 PM	Main Vac valve closed
7/22/2010	4:21:08 PM	Bypass valve closed
7/22/2010	4:21:08 PM	H2 valve opened
7/22/2010	4:21:08 PM	SiCl4 pre valve opened
7/22/2010	4:21:08 PM	SiCl4 post valve opened
7/22/2010	4:21:08 PM	Bubbler valve opened
7/22/2010	4:21:08 PM	Helium MFC set to  0.000000
7/22/2010	4:21:08 PM	H2 MFC set to  500.000000
7/22/2010	4:21:08 PM	BCl3 MFC set to  0.000000
7/22/2010	4:21:08 PM	PHl3 MFC set to  0.000000
7/22/2010	4:21:08 PM	SiCl4 MFC set to  50.000000
7/22/2010	4:21:08 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	4:21:09 PM	Tube furnace set to 1000
7/22/2010	4:31:09 PM	H2 valve closed
7/22/2010	4:31:09 PM	BCl3 valve closed
7/22/2010	4:31:09 PM	PH3 valve closed
7/22/2010	4:31:09 PM	SiCl4 pre valve closed
7/22/2010	4:31:09 PM	SiCl4 post valve closed
7/22/2010	4:31:09 PM	Main Vac valve closed
7/22/2010	4:31:09 PM	Bypass valve closed
7/22/2010	4:31:09 PM	Helium valve opened
7/22/2010	4:31:09 PM	Bubbler valve opened
7/22/2010	4:31:09 PM	Helium MFC set to  500.000000
7/22/2010	4:31:09 PM	H2 MFC set to  0.000000
7/22/2010	4:31:09 PM	BCl3 MFC set to  0.000000
7/22/2010	4:31:09 PM	PHl3 MFC set to  0.000000
7/22/2010	4:31:09 PM	SiCl4 MFC set to  0.000000
7/22/2010	4:31:09 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	4:31:09 PM	Tube furnace set to 0
7/22/2010	4:53:09 PM	Helium valve closed
7/22/2010	4:53:09 PM	H2 valve closed
7/22/2010	4:53:09 PM	BCl3 valve closed
7/22/2010	4:53:09 PM	PH3 valve closed
7/22/2010	4:53:09 PM	SiCl4 pre valve closed
7/22/2010	4:53:09 PM	SiCl4 post valve closed
7/22/2010	4:53:09 PM	Main Vac valve closed
7/22/2010	4:53:09 PM	Bypass valve closed
7/22/2010	4:53:09 PM	Bubbler valve closed
7/22/2010	4:53:09 PM	Helium MFC set to  0.000000
7/22/2010	4:53:09 PM	H2 MFC set to  0.000000
7/22/2010	4:53:09 PM	BCl3 MFC set to  0.000000
7/22/2010	4:53:09 PM	PHl3 MFC set to  0.000000
7/22/2010	4:53:09 PM	SiCl4 MFC set to  0.000000
7/22/2010	4:53:09 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	4:53:09 PM	Tube furnace set to 0
7/22/2010	4:53:09 PM	Run finished at 4:53 PM
7/22/2010	5:00:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	5:00:23 PM	Recipe started at 5:00 PM
7/22/2010	5:00:23 PM	Helium valve closed
7/22/2010	5:00:23 PM	H2 valve closed
7/22/2010	5:00:23 PM	BCl3 valve closed
7/22/2010	5:00:23 PM	PH3 valve closed
7/22/2010	5:00:23 PM	SiCl4 pre valve closed
7/22/2010	5:00:23 PM	SiCl4 post valve closed
7/22/2010	5:00:23 PM	Main Vac valve closed
7/22/2010	5:00:23 PM	Bubbler valve closed
7/22/2010	5:00:23 PM	Bypass valve opened
7/22/2010	5:00:23 PM	Helium MFC set to  0.000000
7/22/2010	5:00:23 PM	H2 MFC set to  0.000000
7/22/2010	5:00:23 PM	BCl3 MFC set to  0.000000
7/22/2010	5:00:23 PM	PHl3 MFC set to  0.000000
7/22/2010	5:00:23 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:00:23 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:00:23 PM	Tube furnace set to 0
7/22/2010	5:01:00 PM	Helium valve closed
7/22/2010	5:01:00 PM	H2 valve closed
7/22/2010	5:01:00 PM	BCl3 valve closed
7/22/2010	5:01:00 PM	PH3 valve closed
7/22/2010	5:01:00 PM	SiCl4 pre valve closed
7/22/2010	5:01:00 PM	SiCl4 post valve closed
7/22/2010	5:01:00 PM	Bubbler valve closed
7/22/2010	5:01:00 PM	Main Vac valve opened
7/22/2010	5:01:00 PM	Bypass valve opened
7/22/2010	5:01:00 PM	Helium MFC set to  0.000000
7/22/2010	5:01:00 PM	H2 MFC set to  0.000000
7/22/2010	5:01:00 PM	BCl3 MFC set to  0.000000
7/22/2010	5:01:00 PM	PHl3 MFC set to  0.000000
7/22/2010	5:01:00 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:01:00 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:01:00 PM	Tube furnace set to 0
7/22/2010	5:01:00 PM	Run finished at 5:01 PM
7/22/2010	5:01:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	5:01:06 PM	Helium MFC set to  100.000000
7/22/2010	5:01:07 PM	Helium valve opened
7/22/2010	5:15:35 PM	Helium valve closed
7/22/2010	5:16:20 PM	Helium valve opened
7/22/2010	5:23:40 PM	Helium valve closed
7/22/2010	5:25:33 PM	Recipe started at 5:25 PM
7/22/2010	5:25:33 PM	Helium valve closed
7/22/2010	5:25:33 PM	BCl3 valve closed
7/22/2010	5:25:33 PM	PH3 valve closed
7/22/2010	5:25:33 PM	SiCl4 pre valve closed
7/22/2010	5:25:33 PM	SiCl4 post valve closed
7/22/2010	5:25:33 PM	Main Vac valve closed
7/22/2010	5:25:33 PM	Bypass valve closed
7/22/2010	5:25:33 PM	Bubbler valve closed
7/22/2010	5:25:33 PM	H2 valve opened
7/22/2010	5:25:33 PM	Helium MFC set to  0.000000
7/22/2010	5:25:33 PM	H2 MFC set to  500.000000
7/22/2010	5:25:33 PM	BCl3 MFC set to  0.000000
7/22/2010	5:25:33 PM	PHl3 MFC set to  0.000000
7/22/2010	5:25:33 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:25:33 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:25:34 PM	Tube furnace set to 0
7/22/2010	5:26:21 PM	Run aborted at 5:26 PM
7/22/2010	5:26:21 PM	Helium valve closed
7/22/2010	5:26:21 PM	H2 valve closed
7/22/2010	5:26:21 PM	BCl3 valve closed
7/22/2010	5:26:21 PM	PH3 valve closed
7/22/2010	5:26:21 PM	SiCl4 pre valve closed
7/22/2010	5:26:21 PM	SiCl4 post valve closed
7/22/2010	5:26:21 PM	Bypass valve closed
7/22/2010	5:26:21 PM	Main Vac valve closed
7/22/2010	5:26:21 PM	Bubbler valve closed
7/22/2010	5:26:21 PM	Helium MFC set to  0.000000
7/22/2010	5:26:21 PM	H2 MFC set to  0.000000
7/22/2010	5:26:21 PM	BCl3 MFC set to  0.000000
7/22/2010	5:26:21 PM	PHl3 MFC set to  0.000000
7/22/2010	5:26:21 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:26:21 PM	Tube furnace set to 0
7/22/2010	5:26:49 PM	Recipe started at 5:26 PM
7/22/2010	5:26:49 PM	Helium valve closed
7/22/2010	5:26:49 PM	BCl3 valve closed
7/22/2010	5:26:49 PM	PH3 valve closed
7/22/2010	5:26:49 PM	SiCl4 pre valve closed
7/22/2010	5:26:49 PM	SiCl4 post valve closed
7/22/2010	5:26:49 PM	Main Vac valve closed
7/22/2010	5:26:49 PM	Bypass valve closed
7/22/2010	5:26:49 PM	Bubbler valve closed
7/22/2010	5:26:49 PM	H2 valve opened
7/22/2010	5:26:49 PM	Helium MFC set to  0.000000
7/22/2010	5:26:49 PM	H2 MFC set to  500.000000
7/22/2010	5:26:49 PM	BCl3 MFC set to  0.000000
7/22/2010	5:26:49 PM	PHl3 MFC set to  0.000000
7/22/2010	5:26:49 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:26:49 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:26:49 PM	Tube furnace set to 0
7/22/2010	5:27:24 PM	Helium valve closed
7/22/2010	5:27:24 PM	BCl3 valve closed
7/22/2010	5:27:24 PM	PH3 valve closed
7/22/2010	5:27:24 PM	SiCl4 pre valve closed
7/22/2010	5:27:24 PM	SiCl4 post valve closed
7/22/2010	5:27:24 PM	Main Vac valve closed
7/22/2010	5:27:24 PM	Bypass valve closed
7/22/2010	5:27:24 PM	H2 valve opened
7/22/2010	5:27:24 PM	Bubbler valve opened
7/22/2010	5:27:24 PM	Helium MFC set to  0.000000
7/22/2010	5:27:24 PM	H2 MFC set to  500.000000
7/22/2010	5:27:24 PM	BCl3 MFC set to  0.000000
7/22/2010	5:27:24 PM	PHl3 MFC set to  0.000000
7/22/2010	5:27:24 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:27:24 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:27:24 PM	Tube furnace set to 1000
7/22/2010	5:47:24 PM	Helium valve closed
7/22/2010	5:47:24 PM	BCl3 valve closed
7/22/2010	5:47:24 PM	PH3 valve closed
7/22/2010	5:47:24 PM	Main Vac valve closed
7/22/2010	5:47:24 PM	Bypass valve closed
7/22/2010	5:47:24 PM	H2 valve opened
7/22/2010	5:47:24 PM	SiCl4 pre valve opened
7/22/2010	5:47:24 PM	SiCl4 post valve opened
7/22/2010	5:47:24 PM	Bubbler valve opened
7/22/2010	5:47:24 PM	Helium MFC set to  0.000000
7/22/2010	5:47:24 PM	H2 MFC set to  500.000000
7/22/2010	5:47:24 PM	BCl3 MFC set to  0.000000
7/22/2010	5:47:24 PM	PHl3 MFC set to  0.000000
7/22/2010	5:47:24 PM	SiCl4 MFC set to  80.000000
7/22/2010	5:47:24 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:47:24 PM	Tube furnace set to 1000
7/22/2010	5:55:44 PM	H2 valve closed
7/22/2010	5:55:44 PM	BCl3 valve closed
7/22/2010	5:55:44 PM	PH3 valve closed
7/22/2010	5:55:44 PM	SiCl4 pre valve closed
7/22/2010	5:55:44 PM	SiCl4 post valve closed
7/22/2010	5:55:44 PM	Main Vac valve closed
7/22/2010	5:55:44 PM	Bypass valve closed
7/22/2010	5:55:44 PM	Helium valve opened
7/22/2010	5:55:44 PM	Bubbler valve opened
7/22/2010	5:55:44 PM	Helium MFC set to  500.000000
7/22/2010	5:55:44 PM	H2 MFC set to  0.000000
7/22/2010	5:55:44 PM	BCl3 MFC set to  0.000000
7/22/2010	5:55:44 PM	PHl3 MFC set to  0.000000
7/22/2010	5:55:44 PM	SiCl4 MFC set to  0.000000
7/22/2010	5:55:44 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	5:55:44 PM	Tube furnace set to 0
7/22/2010	6:21:05 PM	Helium valve closed
7/22/2010	6:21:05 PM	H2 valve closed
7/22/2010	6:21:05 PM	BCl3 valve closed
7/22/2010	6:21:05 PM	PH3 valve closed
7/22/2010	6:21:05 PM	SiCl4 pre valve closed
7/22/2010	6:21:05 PM	SiCl4 post valve closed
7/22/2010	6:21:05 PM	Main Vac valve closed
7/22/2010	6:21:05 PM	Bypass valve closed
7/22/2010	6:21:05 PM	Bubbler valve closed
7/22/2010	6:21:05 PM	Helium MFC set to  0.000000
7/22/2010	6:21:05 PM	H2 MFC set to  0.000000
7/22/2010	6:21:05 PM	BCl3 MFC set to  0.000000
7/22/2010	6:21:05 PM	PHl3 MFC set to  0.000000
7/22/2010	6:21:05 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:21:05 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:21:05 PM	Tube furnace set to 0
7/22/2010	6:21:05 PM	Run finished at 6:21 PM
7/22/2010	6:28:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	6:28:09 PM	Recipe started at 6:28 PM
7/22/2010	6:28:09 PM	Helium valve closed
7/22/2010	6:28:09 PM	H2 valve closed
7/22/2010	6:28:09 PM	BCl3 valve closed
7/22/2010	6:28:09 PM	PH3 valve closed
7/22/2010	6:28:09 PM	SiCl4 pre valve closed
7/22/2010	6:28:09 PM	SiCl4 post valve closed
7/22/2010	6:28:09 PM	Main Vac valve closed
7/22/2010	6:28:09 PM	Bubbler valve closed
7/22/2010	6:28:09 PM	Bypass valve opened
7/22/2010	6:28:09 PM	Helium MFC set to  0.000000
7/22/2010	6:28:09 PM	H2 MFC set to  0.000000
7/22/2010	6:28:09 PM	BCl3 MFC set to  0.000000
7/22/2010	6:28:09 PM	PHl3 MFC set to  0.000000
7/22/2010	6:28:09 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:28:09 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:28:09 PM	Tube furnace set to 0
7/22/2010	6:28:46 PM	Helium valve closed
7/22/2010	6:28:46 PM	H2 valve closed
7/22/2010	6:28:46 PM	BCl3 valve closed
7/22/2010	6:28:46 PM	PH3 valve closed
7/22/2010	6:28:46 PM	SiCl4 pre valve closed
7/22/2010	6:28:46 PM	SiCl4 post valve closed
7/22/2010	6:28:46 PM	Bubbler valve closed
7/22/2010	6:28:46 PM	Main Vac valve opened
7/22/2010	6:28:46 PM	Bypass valve opened
7/22/2010	6:28:46 PM	Helium MFC set to  0.000000
7/22/2010	6:28:46 PM	H2 MFC set to  0.000000
7/22/2010	6:28:46 PM	BCl3 MFC set to  0.000000
7/22/2010	6:28:46 PM	PHl3 MFC set to  0.000000
7/22/2010	6:28:46 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:28:46 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:28:46 PM	Tube furnace set to 0
7/22/2010	6:29:46 PM	H2 valve closed
7/22/2010	6:29:46 PM	BCl3 valve closed
7/22/2010	6:29:46 PM	PH3 valve closed
7/22/2010	6:29:46 PM	SiCl4 pre valve closed
7/22/2010	6:29:46 PM	SiCl4 post valve closed
7/22/2010	6:29:46 PM	Bubbler valve closed
7/22/2010	6:29:46 PM	Helium valve opened
7/22/2010	6:29:46 PM	Main Vac valve opened
7/22/2010	6:29:46 PM	Bypass valve opened
7/22/2010	6:29:46 PM	Helium MFC set to  100.000000
7/22/2010	6:29:46 PM	H2 MFC set to  0.000000
7/22/2010	6:29:46 PM	BCl3 MFC set to  0.000000
7/22/2010	6:29:46 PM	PHl3 MFC set to  0.000000
7/22/2010	6:29:46 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:29:46 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:29:47 PM	Tube furnace set to 0
7/22/2010	6:38:47 PM	Helium valve closed
7/22/2010	6:38:47 PM	H2 valve closed
7/22/2010	6:38:47 PM	BCl3 valve closed
7/22/2010	6:38:47 PM	PH3 valve closed
7/22/2010	6:38:47 PM	SiCl4 pre valve closed
7/22/2010	6:38:47 PM	SiCl4 post valve closed
7/22/2010	6:38:47 PM	Bubbler valve closed
7/22/2010	6:38:47 PM	Main Vac valve opened
7/22/2010	6:38:47 PM	Bypass valve opened
7/22/2010	6:38:47 PM	Helium MFC set to  0.000000
7/22/2010	6:38:47 PM	H2 MFC set to  0.000000
7/22/2010	6:38:47 PM	BCl3 MFC set to  0.000000
7/22/2010	6:38:47 PM	PHl3 MFC set to  0.000000
7/22/2010	6:38:47 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:38:47 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:38:47 PM	Tube furnace set to 0
7/22/2010	6:39:47 PM	H2 valve closed
7/22/2010	6:39:47 PM	BCl3 valve closed
7/22/2010	6:39:47 PM	PH3 valve closed
7/22/2010	6:39:47 PM	SiCl4 pre valve closed
7/22/2010	6:39:47 PM	SiCl4 post valve closed
7/22/2010	6:39:47 PM	Bubbler valve closed
7/22/2010	6:39:47 PM	Helium valve opened
7/22/2010	6:39:47 PM	Main Vac valve opened
7/22/2010	6:39:47 PM	Bypass valve opened
7/22/2010	6:39:47 PM	Helium MFC set to  100.000000
7/22/2010	6:39:47 PM	H2 MFC set to  0.000000
7/22/2010	6:39:47 PM	BCl3 MFC set to  0.000000
7/22/2010	6:39:47 PM	PHl3 MFC set to  0.000000
7/22/2010	6:39:47 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:39:47 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:39:47 PM	Tube furnace set to 0
7/22/2010	6:48:47 PM	Helium valve closed
7/22/2010	6:48:47 PM	H2 valve closed
7/22/2010	6:48:47 PM	BCl3 valve closed
7/22/2010	6:48:47 PM	PH3 valve closed
7/22/2010	6:48:47 PM	SiCl4 pre valve closed
7/22/2010	6:48:47 PM	SiCl4 post valve closed
7/22/2010	6:48:47 PM	Bubbler valve closed
7/22/2010	6:48:47 PM	Main Vac valve opened
7/22/2010	6:48:47 PM	Bypass valve opened
7/22/2010	6:48:47 PM	Helium MFC set to  0.000000
7/22/2010	6:48:47 PM	H2 MFC set to  0.000000
7/22/2010	6:48:47 PM	BCl3 MFC set to  0.000000
7/22/2010	6:48:47 PM	PHl3 MFC set to  0.000000
7/22/2010	6:48:47 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:48:47 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:48:47 PM	Tube furnace set to 0
7/22/2010	6:49:47 PM	H2 valve closed
7/22/2010	6:49:47 PM	BCl3 valve closed
7/22/2010	6:49:47 PM	PH3 valve closed
7/22/2010	6:49:47 PM	SiCl4 pre valve closed
7/22/2010	6:49:47 PM	SiCl4 post valve closed
7/22/2010	6:49:47 PM	Bubbler valve closed
7/22/2010	6:49:47 PM	Helium valve opened
7/22/2010	6:49:47 PM	Main Vac valve opened
7/22/2010	6:49:47 PM	Bypass valve opened
7/22/2010	6:49:47 PM	Helium MFC set to  100.000000
7/22/2010	6:49:47 PM	H2 MFC set to  0.000000
7/22/2010	6:49:47 PM	BCl3 MFC set to  0.000000
7/22/2010	6:49:47 PM	PHl3 MFC set to  0.000000
7/22/2010	6:49:47 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:49:47 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:49:47 PM	Tube furnace set to 0
7/22/2010	6:58:47 PM	Helium valve closed
7/22/2010	6:58:47 PM	H2 valve closed
7/22/2010	6:58:47 PM	BCl3 valve closed
7/22/2010	6:58:47 PM	PH3 valve closed
7/22/2010	6:58:47 PM	SiCl4 pre valve closed
7/22/2010	6:58:47 PM	SiCl4 post valve closed
7/22/2010	6:58:47 PM	Bubbler valve closed
7/22/2010	6:58:47 PM	Main Vac valve opened
7/22/2010	6:58:47 PM	Bypass valve opened
7/22/2010	6:58:47 PM	Helium MFC set to  0.000000
7/22/2010	6:58:47 PM	H2 MFC set to  0.000000
7/22/2010	6:58:47 PM	BCl3 MFC set to  0.000000
7/22/2010	6:58:47 PM	PHl3 MFC set to  0.000000
7/22/2010	6:58:47 PM	SiCl4 MFC set to  0.000000
7/22/2010	6:58:47 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	6:58:47 PM	Tube furnace set to 0
7/22/2010	6:58:48 PM	Run finished at 6:58 PM
7/22/2010	6:58:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/22/2010	8:04:03 PM	Recipe started at 8:04 PM
7/22/2010	8:04:03 PM	Helium valve closed
7/22/2010	8:04:03 PM	BCl3 valve closed
7/22/2010	8:04:03 PM	PH3 valve closed
7/22/2010	8:04:03 PM	SiCl4 pre valve closed
7/22/2010	8:04:03 PM	SiCl4 post valve closed
7/22/2010	8:04:03 PM	Main Vac valve closed
7/22/2010	8:04:03 PM	Bypass valve closed
7/22/2010	8:04:03 PM	Bubbler valve closed
7/22/2010	8:04:03 PM	H2 valve opened
7/22/2010	8:04:03 PM	Helium MFC set to  0.000000
7/22/2010	8:04:03 PM	H2 MFC set to  500.000000
7/22/2010	8:04:03 PM	BCl3 MFC set to  0.000000
7/22/2010	8:04:03 PM	PHl3 MFC set to  0.000000
7/22/2010	8:04:03 PM	SiCl4 MFC set to  0.000000
7/22/2010	8:04:03 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:04:03 PM	Tube furnace set to 0
7/22/2010	8:05:27 PM	Helium valve closed
7/22/2010	8:05:27 PM	BCl3 valve closed
7/22/2010	8:05:27 PM	PH3 valve closed
7/22/2010	8:05:27 PM	SiCl4 pre valve closed
7/22/2010	8:05:27 PM	SiCl4 post valve closed
7/22/2010	8:05:27 PM	Main Vac valve closed
7/22/2010	8:05:27 PM	Bypass valve closed
7/22/2010	8:05:27 PM	H2 valve opened
7/22/2010	8:05:27 PM	Bubbler valve opened
7/22/2010	8:05:27 PM	Helium MFC set to  0.000000
7/22/2010	8:05:27 PM	H2 MFC set to  500.000000
7/22/2010	8:05:27 PM	BCl3 MFC set to  0.000000
7/22/2010	8:05:27 PM	PHl3 MFC set to  0.000000
7/22/2010	8:05:27 PM	SiCl4 MFC set to  0.000000
7/22/2010	8:05:27 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:05:27 PM	Tube furnace set to 1000
7/22/2010	8:27:27 PM	Helium valve closed
7/22/2010	8:27:27 PM	BCl3 valve closed
7/22/2010	8:27:27 PM	PH3 valve closed
7/22/2010	8:27:27 PM	Main Vac valve closed
7/22/2010	8:27:27 PM	Bypass valve closed
7/22/2010	8:27:27 PM	H2 valve opened
7/22/2010	8:27:27 PM	SiCl4 pre valve opened
7/22/2010	8:27:27 PM	SiCl4 post valve opened
7/22/2010	8:27:27 PM	Bubbler valve opened
7/22/2010	8:27:27 PM	Helium MFC set to  0.000000
7/22/2010	8:27:27 PM	H2 MFC set to  500.000000
7/22/2010	8:27:27 PM	BCl3 MFC set to  0.000000
7/22/2010	8:27:27 PM	PHl3 MFC set to  0.000000
7/22/2010	8:27:27 PM	SiCl4 MFC set to  25.000000
7/22/2010	8:27:27 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:27:27 PM	Tube furnace set to 1000
7/22/2010	8:35:47 PM	H2 valve closed
7/22/2010	8:35:47 PM	BCl3 valve closed
7/22/2010	8:35:47 PM	PH3 valve closed
7/22/2010	8:35:47 PM	SiCl4 pre valve closed
7/22/2010	8:35:47 PM	SiCl4 post valve closed
7/22/2010	8:35:47 PM	Main Vac valve closed
7/22/2010	8:35:47 PM	Bypass valve closed
7/22/2010	8:35:47 PM	Helium valve opened
7/22/2010	8:35:47 PM	Bubbler valve opened
7/22/2010	8:35:47 PM	Helium MFC set to  500.000000
7/22/2010	8:35:47 PM	H2 MFC set to  0.000000
7/22/2010	8:35:47 PM	BCl3 MFC set to  0.000000
7/22/2010	8:35:47 PM	PHl3 MFC set to  0.000000
7/22/2010	8:35:47 PM	SiCl4 MFC set to  0.000000
7/22/2010	8:35:47 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:35:47 PM	Tube furnace set to 0
7/22/2010	8:50:27 PM	Helium valve closed
7/22/2010	8:50:27 PM	H2 valve closed
7/22/2010	8:50:27 PM	BCl3 valve closed
7/22/2010	8:50:27 PM	PH3 valve closed
7/22/2010	8:50:27 PM	SiCl4 pre valve closed
7/22/2010	8:50:27 PM	SiCl4 post valve closed
7/22/2010	8:50:27 PM	Main Vac valve closed
7/22/2010	8:50:27 PM	Bypass valve closed
7/22/2010	8:50:27 PM	Bubbler valve closed
7/22/2010	8:50:27 PM	Helium MFC set to  0.000000
7/22/2010	8:50:27 PM	H2 MFC set to  0.000000
7/22/2010	8:50:27 PM	BCl3 MFC set to  0.000000
7/22/2010	8:50:27 PM	PHl3 MFC set to  0.000000
7/22/2010	8:50:27 PM	SiCl4 MFC set to  0.000000
7/22/2010	8:50:27 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:50:27 PM	Tube furnace set to 0
7/22/2010	8:50:27 PM	Run finished at 8:50 PM
7/22/2010	8:52:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2010	8:52:54 PM	Recipe started at 8:52 PM
7/22/2010	8:52:54 PM	Helium valve closed
7/22/2010	8:52:54 PM	H2 valve closed
7/22/2010	8:52:54 PM	BCl3 valve closed
7/22/2010	8:52:54 PM	PH3 valve closed
7/22/2010	8:52:54 PM	SiCl4 pre valve closed
7/22/2010	8:52:54 PM	SiCl4 post valve closed
7/22/2010	8:52:54 PM	Main Vac valve closed
7/22/2010	8:52:54 PM	Bubbler valve closed
7/22/2010	8:52:54 PM	Bypass valve opened
7/22/2010	8:52:54 PM	Helium MFC set to  0.000000
7/22/2010	8:52:54 PM	H2 MFC set to  0.000000
7/22/2010	8:52:54 PM	BCl3 MFC set to  0.000000
7/22/2010	8:52:54 PM	PHl3 MFC set to  0.000000
7/22/2010	8:52:54 PM	SiCl4 MFC set to  0.000000
7/22/2010	8:52:54 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:52:54 PM	Tube furnace set to 0
7/22/2010	8:53:29 PM	Helium valve closed
7/22/2010	8:53:29 PM	H2 valve closed
7/22/2010	8:53:29 PM	BCl3 valve closed
7/22/2010	8:53:29 PM	PH3 valve closed
7/22/2010	8:53:29 PM	SiCl4 pre valve closed
7/22/2010	8:53:29 PM	SiCl4 post valve closed
7/22/2010	8:53:29 PM	Bubbler valve closed
7/22/2010	8:53:29 PM	Main Vac valve opened
7/22/2010	8:53:29 PM	Bypass valve opened
7/22/2010	8:53:29 PM	Helium MFC set to  0.000000
7/22/2010	8:53:29 PM	H2 MFC set to  0.000000
7/22/2010	8:53:29 PM	BCl3 MFC set to  0.000000
7/22/2010	8:53:29 PM	PHl3 MFC set to  0.000000
7/22/2010	8:53:29 PM	SiCl4 MFC set to  0.000000
7/22/2010	8:53:29 PM	Bypass solenoid MFC set to  0.000000
7/22/2010	8:53:29 PM	Tube furnace set to 0
7/22/2010	8:53:29 PM	Run finished at 8:53 PM
7/22/2010	8:53:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
